The Return of the Black Technology of Immortal World

64 Transformation of lithography machine

For a projection lithography machine, the most important thing is to make the mask. After the mask is made, the work is more than half done.

However, due to the particularity of the multi-layer three-dimensional transistor structure, the mask plate is not only one piece, but multiple pieces and layers, which can be exposed separately to complete.

The switching of multiple masks is naturally not something that the original lithography machine can do. For this reason, Yang Qing has made major changes to the optical system and workbench of the lithography machine to meet these special processing needs. .

Fortunately, Yang Qing lives in Huaguo, a country with a large processing industry. Most of the parts, even the high-precision servo motors that need to be imported, can be delivered in a short time, which makes Yang Qing's improvement work much smoother.

The improvement of the lithography machine alone lasted for a month, from the warm late autumn to the icy winter before it was completely over.

Yang Qing studies computers, but lithography machines, as the highest crystallization of human industrial civilization, have brought together a large number of achievements in machinery, electronics, optics and software, although he is using DUV instead of ASML's latest achievement EUV. , but if you want to improve it, you need not only the knowledge level across various industries and categories, but also the same strong hands-on ability.

Not to mention the knowledge structure, but only in terms of hands-on ability, Yang Qing's control over the body has reached the extreme, probably what the brain thinks, and it can be realized for you with his hands, with great strength, a steel plate, he can break it a few times with his hands , you can break out the desired shape.

But in terms of hands-on ability, Yang Qing is definitely not the strongest. From Bai Yi to Bai Shi, the hands-on ability of these robots is even stronger than Yang Qing.

Of course, rather than saying that these robots are powerful, it is better to say that Xiao Ai behind them is powerful.

At this time, the artificial muscles that Yang Qing has worked so hard to research are of value, because the characteristic of artificial muscles is that they are stimulated by electric current to contract.

The chip's ability to control the current is obviously far greater than the control over the movement of the servo motor, because as long as the servo motor rotates, it will have inertia, and when reflected in reality, the final movement of the robot will be slightly deformed.

These deformations are naturally invisible to ordinary humans, but they become flaws in high-precision processing.

So Xiao Ai's power is also shown by relying on the abilities of the robots like Bai Yi and the others.

This is different from Bai Ling Bai Shan. Although Bai Ling Bai Shan can do some jobs that ordinary people can do under the control of Xiaomei, it is impossible to use them to improve the lithography machine. up.

During this period, the silver ion plating technology of silver interconnection was also completed, which is almost the same as the copper interconnection method, except that when chemical vapor deposition is performed, the reagents are different and need to be replaced. It can be said that this is the easiest technology to replace.

When Yang Qing finally stood in front of the completed lithography machine, he couldn't help feeling relieved.

The improved lithography machine has more than doubled in size. Such a huge machine has to be repaired and installed by grinding embroidery needles, which is always difficult for people.

Yang Qing spent so much effort to transform the lithography machine, naturally not just to produce this kind of chip with a 90-nanometer process. In fact, the chip designed by Yang Qing and the others would have been finalized on the 90-nanometer process. The manufacturing process of the engraving machine can reach the level of 28 nanometers in no time.

This is already a domestically produced lens, and it is the thinnest line width that can be achieved after being finely ground by Xiaomei.

Theoretically speaking, such a lens can also process 7nm chips after multiple exposures, but Yang Qing is not very interested in this. The production capacity of 7 nanometers has been exceeded, and his chips cannot be adapted to other people's systems, so they may not be able to compete with others.

Now that the lithography machine has been modified, the next most important thing is to trial produce a batch of chips to verify the effect of the modification.

The previous rough trial was naturally successful. A six-inch silicon wafer had only one chip photolithographically etched on it. After cutting and packaging, it was considered a success, and the performance of the chip was within the expected range.

The following trial production is to verify the improved lithography machine, its production efficiency and cost.

If the cost is too high, it is already higher than the cost of buying chips. No matter how powerful the performance is, after a batch is produced, it must be sealed up and re-activated after upgrading.

The newly purchased one thousand six-inch silicon wafers are placed in the raw material box, and are transported into the lithography machine along with the conveyor belt, and the inside starts to pump air to maintain a relatively vacuum state, and then the silicon wafers are placed in the working On the stage, the coating is spin-coated, dried, and then the mask plate is lifted, and the laser head starts to work.

Although the laser light cannot be seen with the naked eye, the energy of the laser can be seen from the softening and deformation of the photoresist on the silicon wafer.

The operating system of the lithography machine has been completely taken over by Xiao Ai, and the efficiency of lithography has become more than ten times that of the original one. The workbench is moving with the laser head lens at an extremely fast speed, and the engraving is finished soon. One wafer, send it to the next step, and move on to the next wafer.

The next steps were all carried out in a dark box. Even Yang Qing couldn't see the etching, ion implantation and other processes. When he saw them at the exit, they had already become packaged chips.

A total of 30 complete chips can be cut on a six-inch wafer.

Because of the 20GB memory, the surface area of ​​the chip has reached 580 square millimeters. However, these memories are more like CPU caches, which can work at the same frequency as the CPU and directly read data, without the need to Like commonly used memory, it cannot be at the same frequency as the CPU, and can only use an external bus to communicate. Although the speed of the bus is getting faster and faster, its performance is far inferior to that of the CPU cache.

And inside the chip, the CPU and GPU are integrated. Like the settings of most chips today, the integrated memory architecture also greatly improves the performance of the chip.

Yang Qing picked up a chip, looked at the packaged metal cover and the contacts below, put it on a temporary motherboard built in a hurry, opened the CPU socket with a design similar to that of a toothpaste factory, and put the CPU in , press the lever, and the chip is firmly fixed on it.

In fact, this is the CPU socket of the toothpaste factory last year, but it was replaced directly with the launch of new products this year, but those motherboard manufacturers still have a lot of inventory, so Yang Qing directly bought it .

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